JPS6421379U - - Google Patents
Info
- Publication number
- JPS6421379U JPS6421379U JP11450287U JP11450287U JPS6421379U JP S6421379 U JPS6421379 U JP S6421379U JP 11450287 U JP11450287 U JP 11450287U JP 11450287 U JP11450287 U JP 11450287U JP S6421379 U JPS6421379 U JP S6421379U
- Authority
- JP
- Japan
- Prior art keywords
- stand
- imphal
- supported
- wafer
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11450287U JPS6421379U (en]) | 1987-07-28 | 1987-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11450287U JPS6421379U (en]) | 1987-07-28 | 1987-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6421379U true JPS6421379U (en]) | 1989-02-02 |
Family
ID=31355311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11450287U Pending JPS6421379U (en]) | 1987-07-28 | 1987-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6421379U (en]) |
-
1987
- 1987-07-28 JP JP11450287U patent/JPS6421379U/ja active Pending
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